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Electron Microscopy Sciences Evactron Zephyr Plasma Decontaminator

Supplier:  Electron Microscopy Sciences 9100010

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Evactron Model 25 Zephyr Plasma Decontaminator is for SEM/FIB systems that use turbo molecular pumps. IT provides fast and efficient hydrocarbon removal using a remote RF plasma to produce gas-phase radicals that flow downstream through the chamber. There is no damage to samples or sensitive components. It cleans/de-contaminates in the turbo pressure (TMP) regime at 1-50 mTorr and has no adverse effects on the TMP temperatures. It features a desktop controller, SEM/FIB chambers or load locks, and 2 operating regimes-classic mode (roughing pressures) and T-pump mode (turbomolecular pressures).

Catalog No. 50-192-8218


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