CAS: 10497-05-9 Molecular Formula: C9H27O4PSi3 Molecular Weight (g/mol): 314.54 MDL Number: MFCD00008267 InChI Key: QJMMCGKXBZVAEI-UHFFFAOYSA-N Synonym: Phosphoric Acid Tris(trimethylsilyl) Ester PubChem CID: 25317 IUPAC Name: tritrimethylsilyl phosphate SMILES: C[Si](C)(C)OP(=O)(O[Si](C)(C)C)O[Si](C)(C)C